Applied Materials announced three new systems that are used to deposit Metal-Oxide (mostly IGZO) TFTs for both LCD and OLED displays. First up is the AKT-55KS, a plasma enhanced chemical vapor deposition (PECVD) system that handles 8.5-Gen substrates (2.2x2.5 meters). Applied says this system is defect-free and excels at keeping hydrogen out of the CVD).
Applied AKT-55KS
Applied also announced new physical vapor deposition (PVD) deposition systems. They announced two models, the SKT PiVot 25K which handles Gen-6 substrates and the SKT PiVot 55K which handles 8.5-gen substrates. Applied says that their PVD systems use the company's unique tubular cathodes of donor material. Those cathodes rotate using deposition which results in more even deposition.
Applied SKT PiVot
Last month Applied Materials merged with Tokyo Electron (TEL) - to create the a $29 billion worth manufacturing equipment company. Both companies are involved with OLED panel production systems. TEL is working on OLED printing equipment together with Seiko Epson.
