Jusung developed a MOCVD IGZO TFT Process
Jusung Engineering reports that they managed to developed a a new metal organic chemical vapor deposition (MOCVD) technology to apply IGZO for use on flat panels. Jusung says they are the only company to develop an 8-Gen MOCVD IGZO tool, and that this technology will be compatible with future OLED display processes. We talked to Jusung and they say that they are already in talks with several potential clients (in Japan, China and Korea) and they hope to get purchase orders and start shipping equipment in the middle of 2012.
There are other methods (such as sputtering) for IGZO production. Sharp will soon start to produce IGZO displays in their upcoming production line, and over the past year we've seen IGZO OLED prototypes by Sony, Toshiba, AUO and other companies. Most (or all) of these prototypes have been developed using sputtering. Jusung claims that MOCVD will enable higher resolution than sputtering - indeed 4 or even 5 times higher! They also say that scaling sputtering to 8-Gen will be difficult, while their own MOCVD tool will be scalable up to these sizes easily.