PECVD - Page 2

Applied Materials announced a new system for LTPS deposition - used to make AMOLED and LCD displays. The AKT-20K PX PECVD system deposits highly-uniform films on 1.95m² glass sheets that are three times larger than the previous standard size. Applied says that these systems can be used to create 7" to 12" AMOLED displays and enable better resolution panels.

Applied says that they already shipped over 100 LTPS deposition systems worldwide and this new system is the result of 10 year of experience in LTPS technology and has already been shipped to major display manufacturers.

Roth & Rau MicroSystems will partner with the Holst Centre on barriers for flexible electronics. The two companies will develop and install a roll-to-roll PECVD deposition tool in the Holst Centre. This will be used for flexible OLED lighting and organic solar cells.

Ron Mertens from OLED-Info.com recently had the opportunity to interview Toshiki Mizoe, overseas sales manager, Tokki Corporation. Tokki manufactures vacuum process equipment and factory automation system, and developed the first OLED mass production system in 1999, which processed both OLED / electrode material deposition and encapsulation by one system. Tokki's OLED production system has been delivered to most of small molecular OLED manufactures in Japan, Korea and Taiwan.

Q: First of all, thank you for agreeing to conduct this interview. Can you describe your production system (ELVESS)?
ELVESS is cluster tool OLED production system, and it has evaporation chambers for organic materials and metal (for cathode), and automatic encapsulation unit is connected to the system. Total system can be run for 5 to 6 days without stop, with tact time of

GE Global Research and TOKKI Corporation announced a joint agreement to develop PECVD Film Encapsulation technology and equipment for manufacturing organic electronics such as OLED displays.

The goal is to develop and demonstrate equipment that could serve as the foundation for the future manufacturing and sale of glass-based displays that are thinner in design and much lower in cost.

As part of the agreement, GE Global Research will license its patented PECVD film encapsulation process to TOKKI for use in the company's state-of-art OLED manufacturing equipment. OLED devices require a high degree of hermetic sealing or "encapsulation," since moisture and oxygen can impede the devices' functionality.

Universal Display Corporation announced that it has been awarded a $730,000 Small Business Innovation Research (SBIR) Phase II contract by the U.S. Army Research Laboratories (ARL) to continue its development of innovative encapsulation technology for flexible OLEDs.

In this program, entitled Flexible and Conformal Environmental Barrier Technology for Displays, Universal Display will be using a new approach to encapsulate a long-lived, active-matrix OLED (AMOLED) display prototype built on flexible metal foil. During the prior Phase I program, Universal Display and Princeton University demonstrated the feasibility of this multilayer encapsulation process based on plasma-enhanced chemical vapor deposition (or PECVD). This technology, pioneered at Princeton University, is designed to enable the deposition of protective, barrier films onto an OLED’s top surface, a critical element on the development roadmap for flexible OLED displays.

Universal Display Corporation announced it has been awarded a $69,999 Small Business Innovation Research (SBIR) Phase I contract by the U.S. Army Research Laboratories (ARL), for a program entitled Flexible and Conformal Environmental Barrier Technology for Displays.

During this Phase I program, Universal Display will integrate a novel low-temperature plasma enhanced chemical vapor deposition (PECVD) process coating technology with its proprietary FOLED®, TOLED® and PHOLED™ technologies. The PECVD process is based on pioneering research at Princeton University, which is believed to enable the deposition of flexible and protective films onto the top surface in an OLED without causing damage to the OLED. The end result will be the demonstration of a flexible OLED display prototype built on a stainless steel substrate. This research is an important element toward the Company’s goal of developing a rugged, long-lived, thin and lightweight flexible OLED display technology for both military and commercial applications.