RiTdisplay has signed off the system acceptance of the first Gen2 OVPD(R) system for mass production of OLEDs. The engineering teams of RiTdisplay and AIXTRON could jointly qualify OVPD(R) technology for manufacture of OLED devices for full color display applications. The B-testing co-operation yielded OLED devices with better performance as compared to devices manufactured with conventional technology (VTE).
Dr. Yih Chang, General Manager of RiTdisplay, states: "The impressive performance of our OLEDs made by OVPD(R) has proven our investment into this new technology to be right. Use of this new leading edge technology will foster and strengthen our positioning in the OLED display market."
The qualification of the Gen2 manufacturing tool is the breakthrough for OVPD(R) technology. Based on gas phase transport and AIXTRON's proprietary Close Coupled Showerhead (CCS) technology OVPD(R) has significant advantages over conventional deposition equipment (VTE), such as precise control of deposition rates, long term process stability and reproducibility, high throughput due to high deposition rates, high yield due to excellent uniformity, low maintenance and running cost due to highly efficient material utilization etc. The gas phase process further enables realization of advanced device structures including for example graded layers. Organic Vapor Phase Deposition OVPD.
OVPD technology has been exclusively licensed to AIXTRON from Universal Display Corporation (UDC) for equipment manufacture. AIXTRON and UDC have jointly developed and qualified OVPD pre-production equipment.